Ultra mold for encapsulating very thin packages

ABSTRACT

A method of encapsulating a workpiece, particularly a microelectronic device, to achieve a very thin encapsulating layer and reduce the finished device size. The method includes positioning the workpiece in the mold cavity of a mold capable of reducing its volume while the mold compound is in a liquid state from a first volume, where mold compound may be easily added without creating voids, to a second smaller volume which defines the finished workpiece size. The second volume is below the size which would permit the void-free encapsulation of the workpiece in a conventional thermosetting plastic transfer molding machine. The mold may be opened in two stages to prevent damage to thin molded microelectronic devices by opening the perimeter of the mold first while the molded device is still being supported by large molding surfaces. The invention also includes the mold used in the method.

This is a divisional Ser. No. 09/275,169 filed on Mar. 24, 1999, and nowU.S. Pat. No. 6,306,331 B1.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to the encapsulation of thin workpieces,particularly electronic and microelectronic devices, to achieve a verythin, but void-free seal around the workpiece.

2. Description of Related Art

Microelectronic devices must be protected against moisture as well asassembly process and other environmental contaminants. This is commonlydone by encapsulating the device in a mold compound, such as athermosetting plastic, applied by a transfer molding process.

In a typical transfer molding machine used in the microelectronicsindustry, a thin electronic workpiece mounted on a lead frame is clampedbetween two halves of a split mold. The mold defines a mold cavityaround the device with sufficient clearance to allow mold compound to beinjected and flow around the device to encapsulate it. During themolding process mold compound is injected into an inlet and air insidethe mold escapes from a vent.

The mold compound is initially provided in a non-liquid pellet formcontaining a desired quantity of the compound. The pellet is heatedunder pressure in a chamber until it is liquefied. A plunger then drivesthe liquefied mold compound into the mold cavity. The mold compound isallowed cure and the mold is opened, releasing the encapsulatedmicroelectronic device.

Because smaller microelectronic devices are highly desirable, devicemanufacturers would like to reduce the thickness of the encapsulatinglayer of mold compound which encases each device. Thinner encapsulatinglayers also aid in improving device performance or reliability withregard to heat dissipation, resistance to coating damage under thermalstress and other parameters. However, as the distance between the innermold surfaces and the electronic workpiece is decreased, it becomes moredifficult to obtain a high quality void-free encapsulant around theentire device.

To obtain a void-free seal, the liquefied mold compound must enter themold inlet and entirely fill the space in the mold cavity before themold compound flow front arrives at the mold vent. If the mold compoundreaches the vent before the mold is completely filled, an air bubble istrapped in the mold, creating a void.

To completely fill the mold cavity, the mold compound must flow betweenthe upper mold surface and the upper surface of the device, between thelower mold surface and the lower surface of the device, and into thespace surrounding the outer perimeter of the device. However, as thedistance between the upper and lower mold surfaces and the device isreduced, so as to make the encapsulating coating thinner, it becomesmore difficult for the mold compound to penetrate these regions.

If this distance is reduced too far, the mold compound will flow aroundthe outer perimeter of the device before the mold compound flow fronthas displaced the air in the space above and below the device. Theresult is a void in the encapsulation material as an air bubble ispinched off in the center of the device.

As a result, transfer molding of semiconductor devices with conventionalequipment has required that the distance from the inner mold surfaces tothe device be at least about 200-250 micrometers. This ensures thatthere will be laminar flow of the molding compound into the mold andaround the device. The exact minimum distance limit is, of course, afunction of the specific mold compound used, the fillers it contains andprocess parameters, such as temperature, but, in general, reducing thedistance from the inner mold surfaces to the device to less than someminimum distance results in unacceptable manufacturing losses due to theformation of voids.

Provided that sufficient clearance between the inner mold surfaces andthe device is maintained, however, the flow of the mold compound duringinjection remains laminar, and the flow fronts above and below thedevice remain relatively balanced, so as to prevent the formation ofvoids. On the other hand, it is known that acceptable sealing of thedevice and protection against environmental contamination can beachieved with an encapsulation thickness that is well below thisthickness limit.

SUMMARY OF THE INVENTION

Bearing in mind the problems and deficiencies of the prior art, it istherefore an object of the present invention to provide a method ofencapsulating an electronic workpiece with an outer coating of moldcompound which is thinner than the thickness limit heretofore achievablewith conventional transfer molding.

A further object of the invention is to provide a method ofencapsulating an electronic workpiece with a coating of mold compoundthat is void-free.

It is yet another object of the present invention to provide a method ofencapsulating an electronic workpiece by varying the mold dimensionswhile the mold compound is in a liquid state.

Yet another object of the present invention is to provide a mold forencapsulating an electronic workpiece that can vary in volume from afirst volume where mold compound can be injected easily and completelysurround the device with a relatively thick coating to a second reducedvolume in which only a thin encapsulating coating remains.

Still other objects and advantages of the invention will in part beobvious and will in part be apparent from the specification.

The above and other objects and advantages, which will be apparent toone of skill in the art, are achieved in the present invention which isdirected to a method of encapsulating an electronic workpiece and to amold for use in the method. In the most basic form of the method of thisinvention, a mold cavity having a first volume has an electronicworkpiece positioned therein. Mold compound is added to the mold cavityto encapsulate the microelectronic device, and the volume of the moldcavity is then reduced to a second volume less than the first volume.The mold compound is then cured and the device removed.

In the preferred method of the invention, the mold has a first volumewith a size sufficiently large to permit laminar flow of the moldcompound around substantially all sides of the electronic workpieceduring the step of adding mold compound to the mold cavity. The secondvolume has a size less than the size necessary to permit such laminarflow. This allows the mold to produce very thin coatings of a thicknessless than would otherwise be possible by conventional transfer moldingtechniques.

In the most highly preferred method of the invention, the mold cavity isadapted to receive a substantially planar electronic workpiece andincludes a pair of opposed mold surfaces on opposite sides of thedevice. The volume of the mold cavity is reduced to the second volume byreducing the distance between the pair of opposed mold surfaces of themold cavity.

The volume is reduced in one aspect of the method of this invention byproviding a tapered clamp cavity defined between two opposed clampplates having inclined ramp surfaces. The mold is held between theopposed clamp plates and is moved deeper into the tapered clamp cavityto reduce the distance between opposed mold surfaces of the mold cavity.

The mold compound used in connection with this method is typically athermosetting plastic. In accordance with the method, the mold compoundincludes a filler. The filler is typically silica, but other fillers canbe used to enhance thermal, electrical or mechanical properties of themold compound.

The invention is particularly suitable for encapsulating microelectronicdevices, but is also suitable for encapsulating other thin electronicworkpieces, including printed circuits, various types of electroniccomponents, microcircuits and the like.

The invention also includes the mold used in connection with the methoddescribed above. The mold includes a mold cavity having a volume definedby a plurality of mold surfaces, a first one of the mold surfaces beingmovable to reduce the volume of the mold cavity from a first volume to asmaller second volume. The mold cavity is openable to receive amicroelectronic device, and an inlet communicates with the mold cavityfor adding mold compound. The mold surfaces are sufficiently far fromthe electronic workpiece when the mold is in the first volumeconfiguration to allow mold compound to be added to the mold cavitywithout forming voids.

BRIEF DESCRIPTION OF THE DRAWINGS

The features of the invention believed to be novel and the elementscharacteristic of the invention are set forth with particularity in theappended claims. The figures are for illustration purposes only and arenot drawn to scale. The invention itself, however, both as toorganization and method of operation, may best be understood byreference to the detailed description which follows taken in conjunctionwith the accompanying drawings in which:

FIG. 1 is a side view, in cross-section, of a mold containing amicroelectronic device and lead frame to be encapsulated in accordancewith the method of this invention. The mold is shown in its large, firstvolume, configuration and is clamped and ready to be filled with moldcompound.

FIG. 2 is a side view, in cross-section, of the mold in FIG. 1, still inthe first volume configuration, showing the mold at an intermediate timeduring the transfer molding operation. Mold compound is shown beingtransferred from an inlet at the left into the mold and balanced flowfronts above and below the device are depicted.

FIG. 3 is a side view, in cross-section, of the mold in FIG. 1, still inthe first volume configuration, showing the mold completely filled,prior to reducing the volume of the mold to the second volume.

FIG. 4 is a side view, in cross-section, of the mold in FIG. 1, showingthe mold in the reduced, second volume configuration.

FIG. 5 is a side view, in cross-section, of the mold in FIG. 1, showingthe mold being opened to release the device.

FIG. 6 is a side view, in cross-section, of an alternative embodiment ofthe mold of the invention.

DESCRIPTION OF THE PREFERRED EMBODIMENT(S)

In describing the preferred embodiment of the present invention,reference will be made herein to FIGS. 1-6 of the drawings in which likenumerals refer to like features of the invention. Features of theinvention are not necessarily shown to scale in the drawings.

FIG. 1 illustrates a preferred embodiment of a mold used in connectionwith the method of encapsulating an electronic workpiece describedherein. The mold 10 includes a mold cavity 12 having an inlet 14 and avent 16. The inner surfaces at the perimeter of the mold cavity areformed by upper clamp plate 18 a, 18 b and lower clamp plate 20 a, 20 b.

The clamp plate 18 a, 18 b defines a generally rectangular perimeter forthe upper portion of the mold cavity. Upper movable cavity plate 22 sitswithin the rectangular opening in the upper clamp plate 18 a, 18 b, andit will be understood that in the cross sectional view of FIG. 1, theright side 18 a and the left side 18 b are the right and left portionsof a single clamp plate appearing in cross section. The lower clampplate 20 a, 20 b is similar, having a generally rectangular openingsealed by the lower movable cavity plate 24.

The upper and lower movable cavity plates 22, 24 define the upper andlower surfaces of the mold cavity 12 respectively. The mold 10,including the upper and lower movable cavity plates 22, 24, is mountedbetween upper and lower drive plates 26, 28. The upper and lower driveplates 26, 28 contact the upper and lower movable cavity plates 22, 24,and prevent them from moving outward during the molding operation asmold compound is introduced into the mold.

The upper and lower clamp plates can be separated to receive amicroelectronic device 30 mounted on a lead frame 32. The clamp plates18, 20 are clamped together in a conventional way with an externalclamping mechanism that provides a vertical clamping force sufficient tohold the lead frame and to allow a mold compound, preferably athermosetting resin, to be added to the mold cavity 12.

Inlet 14 is connected to a chamber in the transfer molding machine (notshown) which heats a pellet of thermosetting resin to liquefy it. Theliquefied resin is injected under pressure into the mold shown in FIG. 1through the inlet 14.

FIG. 2 shows the mold compound 34 flowing into the mold cavity 12 withtwo relatively uniform and equalized flow fronts 36, 38 on oppositesides of the microelectronic device 30. It will be noted in FIG. 2 thatthe flow fronts are curved and that the resin 34 in the boundary layerregions close to the device 30 and close to the upper and lower innersurfaces of the mold cavity 40, 42 lag behind portion of the flow frontwhich is at the maximum distance from these surfaces.

This curvature of the mold compound flow front is caused by the frictionbetween the moving mold compound and the inner surfaces of the mold. Themovable cavity plates 22, 24 are set such that void-free filling of themold cavity can be reliably completed for each molding operation.

The movable cavity plates 22, 24 move relative to the microelectronicdevice 30 so as to increase or decrease the distance between their innersurfaces 40, 42 and the device 30. The distance is set to permit alaminar flow of the mold compound between the inner surfaces 40, 42 andthe outer surfaces of the lead frame and microelectronic device 30. Thisinsures that the mold compound 34 will substantially completely fill theinterior of the mold cavity before the mold compound arrives at the vent16 at the opposite end of the mold cavity.

For a conventional mold compound, this distance will be greater than 200micrometers, preferably greater than 250 micrometers. As the moldcompound 34 is added, the clamp plates 18, 20 are prevented fromseparating by conventional clamping means (not shown) and the movablecavity plates 22, 24 are prevented from opening further by the driveplates 26, 28.

FIG. 3 shows the mold cavity 12 completely filled with the mold compound34. At this stage of the molding operation, the mold compound is stillin its liquid form. FIGS. 1, 2 and 3 all show the mold 10 with the moldcavity 12 in its largest volume position which is the first volumeconfiguration used for filling the mold. This first volume configurationpermits the mold compound 34 to easily flow into all areas of the mold,particularly the region directly above and below the center of theelectronic workpiece 30.

FIG. 4 shows the mold in the reduced or second volume configuration. Inthis configuration, the upper and lower movable cavity plates 22, 24,have been driven towards the device 30 by the relative motion betweenthe upper and lower drive plates 26, 28 and the mold.

The upper drive plate 26 includes an inclined ramp surface 46. The lowerdrive plate 28 also includes an inclined ramp surface 48, which facesthe ramp surface 46. The upper and lower movable cavity plates havematching angled surfaces 50, 52 which slide on the ramp surfaces 46, 48.

As the drive plates move to the right and the clamp plates move relativeto the drive plates in the direction shown by arrow 54, the movablecavity plates are compressed toward each other by the action of the rampsurfaces 46, 48. This reduces the distance from the inner surfaces 40,42 to the device 30 and decreases the volume of the mold cavity. As thevolume of the mold cavity is reduced, mold compound is squeezed out ofthe mold cavity. The excess mold material is preferably squeezed backinto the mold inlet 14, however the mold may also be provided withalternative outlets for the excess material, or the vent 16 may be used.

With the mold in the first volume configuration of FIGS. 1-3, the moldcavity is filled easily and completely as the mold compound enters themold and spreads in laminar flow. After the mold is filled, the volumeis reduced to the second volume configuration of FIG. 4. This secondvolume configuration is below the volume which allows such laminar flow.

The control over the volume of the mold allows different mold compoundsto be used. Specifically, fillers may be added to the mold compoundhaving desirable properties, but which might otherwise increaseviscosity or not be capable of use in a conventional transfer moldingmachine.

Alternatively, additives that are presently in use solely to improve thethermosetting resin molding properties, but which otherwise have littlevalue in the cured mold compound, may be eliminated due to the ease withwhich the mold of this invention may be filled.

FIG. 5 shows the mold as it is being opened to remove the molded device30. At this point in the removal process, the clamp plates have beenseparated by moving the upper clamp plate 18 a, 18 b vertically up andthe lower clamp plate 20 a, 20 b vertically down. This separation can beseen best at the vent 16 and the mold inlet 14 where clamp plates 18 b,20 b have moved away from the mold compound 34.

The upper and lower drive plates 26, 28, have also been moved verticallyaway from each other, and they have been moved by the same distance thatthe upper and lower clamp plates were moved. However, this motion of thedrive plates away from the device 30 does not cause the cavity plates22, 24 to open. The separation of the drive plates is exactly cancelledout by actively moving the drive plates horizontally to the right (inFIG. 5) so that the cavity plates 22, 24 are now deeper in the taperedcavity formed between the ramp surfaces 46, 48.

Moving the drive plates vertically apart with the clamp plates istypically done by mounting the upper and lower drive plates to the sameexternal clamping mechanism as the upper and lower clamp plates. Thedrive plates are mounted to the external vertical clamping mechanism sothat they can be moved horizontally, and a horizontal drive mechanism isprovided to accomplish this motion, as needed to move the ramp surfaces46, 48 relative to the clamp plates in the directions described above.

The net result of the simultaneous vertical outward motion of the driveplates with the horizontal motion is to keep the molded device clampedbetween the inner surfaces of the mold cavity 40, 42 until the entireperimeter of that device has been separated from the perimeter moldingsurfaces on the clamp plates.

This technique provides a significant advantage for the thin moldeddevices of the present invention as compared to prior removaltechniques. With the technique described here, the molded device 30 isfully supported by the movable cavity plates 22, 24 during the criticalstage when the mold is first opened. It is not uncommon for the moldingcompound to stick to the mold surface slightly as the mold is opened. Byopening the perimeter first, the device is partially freed and the riskof damaging the molded device is significantly reduced.

After the perimeter is opened to the stage seen in FIG. 5, the remainderof the mold is opened by separating movable cavity plates 22, 24 toremove the molded device.

FIG. 6 shows an alternative mold design in accordance with the presentinvention. In this embodiment, the cavity plates 22, 24 are opened andclosed by vertical drivers 56, 58 operating drive rods 60, 62. Thevertical drivers and drive rods may be any type of linear driver.Threaded rods driven by screw drivers and motors may be used, as mayhydraulic piston/cylinder drivers or appropriately designed pneumaticpiston/cylinder actuators.

Regardless of whether the design in FIGS. 1-5 or the design in FIG. 6 isused, the cavity plates 22, 24 need to be strongly supported. During themolding process, the cavity plates need to provide sufficient clampingforce to resist the outward pressure from the injected molding compound.After the molding compound is injected, the cavity plate drivers need toprovide sufficient closing force to close the mold and eject excessmolding compound.

In both designs, the preferred method of opening the mold is to open theperimeter first, then open the cavity plates. The construction of themold with the separate motion for the cavity plates permits this methodof opening the mold in all cases. the present invention has beenparticularly described, in conjunction with a specific preferredembodiment, it is evident that many alternatives, modifications andvariations will be apparent to those skilled in the art in light of theforegoing description. It is therefore contemplated that the appendedclaims will embrace any such alternatives, modifications and variationsas falling within the true scope and spirit of the present invention.

Thus, having described the invention, what is claimed is:
 1. A mold forencapsulating a workpiece comprising: a pair of opposed cavity plates,the cavity plates having corresponding inner mold surfaces on oppositesides of a mold cavity having a first volume, each cavity plate havingan inclined ramp outer surface; a pair of opposed drive plates, eachdrive plate having an inclined ramp inner surface, the inclined rampinner surfaces on the opposed drive plates defining a tapered clampcavity bearing against the inclined ramp outer surfaces on the opposeddrive plates; and the cavity plates and drive plates being slidinglymounted relative to each other to reduce the volume of the mold cavityto a second volume, less than the first volume, by moving the cavityplates into the tapered clamp cavity to reduce the distance between theopposed mold surfaces of the mold cavity.
 2. The mold for encapsulatinga workpiece according to claim 1 wherein: the mold cavity is openable toreceive the workpiece between the mold surfaces; the mold furtherincludes an inlet communicating with the mold cavity for adding moldcompound to the mold cavity to encapsulate the workpiece; and the moldsurfaces are located sufficiently far from the workpiece in the firstvolume to allow mold compound to be added to the mold cavity withoutforming voids.
 3. The mold for encapsulating a workpiece according toclaim 2 wherein: the mold cavity is shaped to receive a substantiallyplanar workpiece; the mold surfaces are substantially planar; and theworkpiece is located substantially equidistant between the moldsurfaces.
 4. The mold for encapsulating a workpiece according to claim 3wherein the mold surfaces move in opposition to each other from firstpositions to second positions, the first positions being sufficientlyfar from the workpiece that mold compound may be added to the moldcavity through the inlet without forming voids, and the second positionsbeing sufficiently close to the workpiece that mold compound added tothe mold cavity through the inlet would form voids.
 5. The mold forencapsulating a workpiece according to claim 2 wherein the mold cavityis shaped to receive an electronic workpiece.
 6. The mold forencapsulating a workpiece according to claim 5 wherein the mold cavityis shaped to receive a microelectronic device.
 7. The mold forencapsulating a workpiece according to claim 1 wherein the pair ofopposed mold surfaces are located at defined distances from theworkpiece to equalize flow fronts of a mold compound on opposite sidesof the workpiece.
 8. The mold for encapsulating a workpiece according toclaim 1 wherein the mold is openable in two stages, the first stageincluding opening a perimeter of the mold, and the second stagecomprising separating the cavity plates.
 9. The mold for encapsulating aworkpiece according to claim 8 further including a pair of opposed clampplates for clamping the workpiece and wherein the clamp plates define aperimeter for the mold cavity.
 10. The mold for encapsulating aworkpiece according to claim 1 further including drivers connected tomove the opposed cavity plates and drive plates relative to each other,the drivers simultaneously moving the drive plates apart andrepositioning the cavity plates deeper into the tapered cavity, thesimultaneous motion apart and repositioning canceling outward motion ofthe cavity plates relative to each other.
 11. The mold for encapsulatinga workpiece according to claim 10 further including a pair of opposedclamp plates and wherein the clamp plates define a perimeter for themold cavity, the simultaneous motion apart and repositioning opening theperimeter of the mold while canceling outward motion of the cavityplates relative to each other.
 12. The mold for encapsulating aworkpiece according to claim 1 further including linear driversconnected to the opposed cavity plates to drive the opposed cavityplates towards and away from each other.
 13. The mold for encapsulatinga workpiece according to claim 9 wherein the clamp plates are connectedto the drive plates, whereby separating the drive plates opens theperimeter of the mold cavity.